Activation and pumping characteristics of Ti–Zr–V films deposited on narrow tubes
Bangle Zhu, Xiaoqin Ge, Sihui Wang, Wei Wei, Yigang Wang, Gongfa Liu, Yong Wang
Topics & Concepts
Materials scienceX-ray photoelectron spectroscopyGetterOutgassingAnalytical Chemistry (journal)Sticking probabilitySputteringAnnealing (glass)Thin filmSputter depositionMonolayerThermal desorptionDesorptionComposite materialChemical engineeringNanotechnologyChemistryPhysical chemistryEngineeringOrganic chemistryAdsorptionChromatographyOptoelectronicsMetal and Thin Film MechanicsAdvanced materials and compositesTitanium Alloys Microstructure and Properties