A novel material detection method using femtosecond laser, confocal imaging and image processing enabling endpointing in fast inspection of microelectronics
Adrian Phoulady, Nicholas May, Hongbin Choi, Sina Shahbazmohamadi, Pouya Tavousi
Topics & Concepts
MicroelectronicsLaserLaser-induced breakdown spectroscopyFemtosecondMaterials scienceSample (material)ConfocalOpticsComputer scienceSpectroscopyImage processingArtificial intelligenceOptoelectronicsImage (mathematics)ChemistryPhysicsChromatographyQuantum mechanicsLaser-induced spectroscopy and plasmaLaser Material Processing TechniquesIntegrated Circuits and Semiconductor Failure Analysis