A unified approach for the calculation of in-plane dielectric constant of films with interdigitated electrodes
Trygve M Reader, Ulrik Hanke, Einar Halvorsen, Tor Grande
Abstract
Abstract Interdigitated electrodes (IDEs) on dielectric films is an important electrode design in electrical components such as transducers and sensors. Further development and use of IDEs for characterization of the in-plane properties of dielectric films requires models for the capacitance, particularly when used in a multilayer stack. Previous models for the capacitance have permitted erroneous boundary conditions between layers with associated limitations to accuracy. In this work we present a new model based on fulfilling the boundary conditions between layers with different dielectric constant. We further demonstrate how the model can be used to calculate the in-plane dielectric constant and polarization of BaTiO 3 films. The model is shown to outperform previous models using both the experimental data from BaTiO 3 films on SrTiO 3 substrates and finite element method simulations of the corresponding case. One important advantage compared to previous work is that the new model provides good results regardless of film thickness.