Magnetron sputter deposition of ultrathick boron carbide coatings on spherical substrates for inertial confinement fusion
J. B. Merlo, Jean‐Baptiste Forien, Sean Hayes, K. Kawasaki, S. J. Shin, L. R. Sohngen, G. V. Taylor, S. O. Kucheyev
Topics & Concepts
Boron carbideMaterials scienceDeposition (geology)Sputter depositionCoatingInertial confinement fusionSubstrate (aquarium)Amorphous solidComposite materialSputteringNanotechnologyThin filmOpticsChemistryGeologyOrganic chemistrySedimentPaleontologyOceanographyPhysicsLaserBiologyDiamond and Carbon-based Materials ResearchLaser-Plasma Interactions and DiagnosticsMetal and Thin Film Mechanics