Formation of cerium oxide film via post-sputter oxidation of cerium in nitrogen/oxygen/nitrogen ambient
Ainita Rozati Mohd Zabidi, Way Foong Lim
Topics & Concepts
CeriumCerium oxideMaterials scienceOxygenAnalytical Chemistry (journal)Cerium nitrateNitrogenInorganic chemistryOxideDielectricSputteringThin filmChemistryMetallurgyNanotechnologyOrganic chemistryChromatographyOptoelectronicsSemiconductor materials and devicesCatalytic Processes in Materials ScienceZnO doping and properties