Litcius/Paper detail

Microstructures, mechanical properties and corrosion resistance of TiN/AlN multilayer films

Bin Zuo, Junhua Xu, Guiyun Lu, Hongbo Ju, Lihua Yu

2022Ceramics International37 citationsDOI

Topics & Concepts

Materials scienceTinCorrosionNanoindentationMicrostructureTransmission electron microscopyComposite materialSputter depositionMetallurgySputteringThin filmNanotechnologyMetal and Thin Film MechanicsGaN-based semiconductor devices and materialsBoron and Carbon Nanomaterials Research