Microstructures, mechanical properties and corrosion resistance of TiN/AlN multilayer films
Bin Zuo, Junhua Xu, Guiyun Lu, Hongbo Ju, Lihua Yu
Topics & Concepts
Materials scienceTinCorrosionNanoindentationMicrostructureTransmission electron microscopyComposite materialSputter depositionMetallurgySputteringThin filmNanotechnologyMetal and Thin Film MechanicsGaN-based semiconductor devices and materialsBoron and Carbon Nanomaterials Research