Close atomic surface on aluminum alloy using green chemical mechanical polishing with synergistic effect between yttria and silica abrasives
Zeyun Wang, Zhenyu Zhang, Hongxiu Zhou, Dong Han, Chunjing Shi, Leilei Chen, Jian Guo Yao, Shiqiang Yu, Jianan Xu
Topics & Concepts
PolishingChemical-mechanical planarizationMaterials scienceAlloyAluminiumYttria-stabilized zirconiaMetallurgyAtomic force microscopyNanotechnologyCubic zirconiaCeramicAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchMetal and Thin Film Mechanics