Remarkably enhanced plasma resistance of Y2O3- and Y-rich thin films through controllable reactive sputtering
Hae-Seong Jang, Kang-Bin Bae, Se-Rin Min, Yoon-Suk Oh, In-Hwan Lee, Sung‐Min Lee
Topics & Concepts
SputteringMaterials scienceThin filmPlasmaChemical engineeringComposite materialChemistryMetallurgyNanotechnologyPhysicsEngineeringQuantum mechanicsZnO doping and propertiesSemiconductor materials and devicesGa2O3 and related materials