Effects of oxygen vacancies on ferroelectric characteristics of RF-sputtered Hf0.5Zr0.5O2
Changhyeon Han, Ki Ryun Kwon, Jeonghan Kim, Jiyong Yim, Sangwoo Kim, Eun Chan Park, Ji Won You, Soi Jeong, Rino Choi, Daewoong Kwon, Daewoong Kwon
Topics & Concepts
FerroelectricityMaterials scienceAnnealing (glass)DepolarizationQuantum tunnellingOxygenPolarization (electrochemistry)OptoelectronicsDielectricCondensed matter physicsAnalytical Chemistry (journal)Composite materialChemistryPhysical chemistryOrganic chemistryMedicinePhysicsEndocrinologyChromatographyFerroelectric and Negative Capacitance DevicesSemiconductor materials and devicesAdvanced Memory and Neural Computing