Effect of substrate bias on the microstructure and mechanical and tribological properties of ZrNbTiMo refractory high entropy alloy film
Junjun Wang, Xinyu Liu, Yan Zhang, Wumin Cai, Linqing Wang, Liwen Tang
Topics & Concepts
Materials scienceMicrostructureSputter depositionTribologySurface roughnessAlloyComposite materialSubstrate (aquarium)SputteringSurface finishThin filmNanotechnologyGeologyOceanographyHigh Entropy Alloys StudiesMetal and Thin Film MechanicsHigh-Temperature Coating Behaviors