Microstructural and mechanical properties of TiN/CrN and TiSiN/CrN multilayer coatings deposited in an industrial-scale HiPIMS system: Effect of the Si incorporation
N. Sala, M. Rebelo de Figueiredo, Robert Franz, Christina Kainz, J.C. Sánchez-López, T.C. Rojas, D.F. Reyes, Carles Colominas, M.D. Abad
Topics & Concepts
TinHigh-power impulse magnetron sputteringMaterials scienceMetallurgyNanotechnologySputteringThin filmSputter depositionMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchAdvanced ceramic materials synthesis