Biomimetic Soft Polymer Microstructures and Piezoresistive Graphene MEMS Sensors Using Sacrificial Metal 3D Printing
Amar M. Kamat, Yutao Pei, Bayu Jayawardhana, Ajay Giri Prakash Kottapalli
Abstract
, 3D double helical microfluidic channels embedded inside high-aspect ratio pillars) that are difficult or impossible to fabricate using currently available techniques. The microfluidic channels are further infused with conductive graphene nanoplatelet ink to realize two flexible piezoresistive microelectromechanical (MEMS) sensors (a bioinspired flow/tactile sensor and a dome-like force sensor) with embedded sensing elements. The MEMS force sensor is integrated into a Philips 9000 series electric shaver to demonstrate its application in "smart" consumer products in the future. Aided by current trends in industrialization and miniaturization in metal 3D printing, the proposed workflow shows promise as a low-temperature, scalable, and cleanroom-free technique of fabricating complex, soft polymeric, biomimetic structures, and embedded MEMS sensors.