Experimental study on water jet guided laser micro-machining of mono-crystalline silicon
Hongchao Qiao, Zhihe Cao, Cui Jianfeng, Jibin Zhao
Topics & Concepts
MachiningMaterials scienceScanning electron microscopeLaserBrittlenessEnhanced Data Rates for GSM EvolutionJet (fluid)OpticsSiliconComposite materialLaser power scalingMetallurgyPhysicsThermodynamicsTelecommunicationsComputer scienceAdvanced Surface Polishing TechniquesLaser Material Processing TechniquesAdvanced Machining and Optimization Techniques