Synergistic effect of composite complex agent on BTA removal in post CMP cleaning of copper interconnection
Da Yin, Yang Liu, Tengda Ma, Yi Xu, Baimei Tan, Fan Yang, Xiaoqin Sun, Mengrui Liu
Topics & Concepts
BenzotriazoleCopperAdsorptionX-ray photoelectron spectroscopyComposite numberContact angleScanning electron microscopeChelationElectrochemistryChemistryCleaning agentMaterials scienceReducing agentChemical engineeringNuclear chemistryInorganic chemistryMetallurgyComposite materialOrganic chemistryElectrodePhysical chemistryEngineeringAdvanced Surface Polishing TechniquesCorrosion Behavior and InhibitionIntegrated Circuits and Semiconductor Failure Analysis