Influence of N content on structure and mechanical properties of multi-component Al-Cr-Nb-Y-Zr based thin films by reactive magnetron sputtering
Kristina von Fieandt, Lars Riekehr, Barbara Osinger, Stefan Fritze, Erik Lewin
Topics & Concepts
Materials scienceNitrideNanoindentationAmorphous solidZirconium nitrideThin filmSputter depositionSputteringNanocompositePhase (matter)NanoclustersComposite materialDuctility (Earth science)Chemical engineeringMetallurgyNanotechnologyCrystallographyTitanium nitrideLayer (electronics)CreepOrganic chemistryEngineeringChemistryMetal and Thin Film MechanicsBoron and Carbon Nanomaterials ResearchAdvanced ceramic materials synthesis