Room temperature deposition of very thin and flexible crystalline ITO thin film using 3-D facing-magnetron sputtering plasma source
Long Wen, Bibhuti B. Sahu, Geun Young Yeom, Jeon G. Han
Topics & Concepts
Materials scienceThin filmMicrostructureSputter depositionNanoclustersTransmittanceSputteringHigh-power impulse magnetron sputteringPlasmaOptoelectronicsDeposition (geology)Cavity magnetronGrain sizeComposite materialNanotechnologyPhysicsQuantum mechanicsBiologySedimentPaleontologyZnO doping and propertiesPlasma Diagnostics and ApplicationsGas Sensing Nanomaterials and Sensors