A review of polymethyl methacrylate (PMMA) as a versatile lithographic resist – With emphasis on UV exposure
Faiz Rahman, Daniel J. Carbaugh, Jason T. Wright, Parthiban Rajan, Sneha G. Pandya, Savaş Kaya
Topics & Concepts
ResistLithographyMaterials sciencePhotoresistElectron-beam lithographyFabricationNanotechnologyPolymethyl methacrylatePhotolithographyPolymerOptoelectronicsComposite materialPathologyLayer (electronics)Alternative medicineMedicineAdvancements in Photolithography TechniquesNanofabrication and Lithography TechniquesMicrofluidic and Capillary Electrophoresis Applications