Bipolar device fabrication using a scanning tunnelling microscope
Tomáš Škereň, S. A. Köster, Bastien Douhard, Claudia Fleischmann, Andreas Fuhrer
Topics & Concepts
Materials scienceScanning tunneling microscopeDopantFabricationLithographyOptoelectronicsSiliconNanowireDopingNanotechnologyAlternative medicinePathologyMedicineAdvancements in Semiconductor Devices and Circuit DesignQuantum and electron transport phenomenaSurface and Thin Film Phenomena