Atomic understanding of the densification removal mechanism during chemical mechanical polishing of fused glass
Wei Liu, Song Yuan, Xiaoguang Guo
Topics & Concepts
Materials scienceReaxFFPolishingMolecular dynamicsComposite materialPenetration (warfare)Atomic unitsChemical engineeringChemical physicsNanotechnologyChemistryComputational chemistryInteratomic potentialOperations researchQuantum mechanicsPhysicsEngineeringAdvanced Surface Polishing TechniquesGlass properties and applicationsLaser Material Processing Techniques