The structural evolution of light-ion implanted 6H-SiC single crystal: Comparison of the effect of helium and hydrogen
N. Daghbouj, Baolin Li, M. Callisti, Hüseyin Şener Şen, Jun Lin, Xin Ou, Miroslav Karlı́k, Tomáš Polcar
Topics & Concepts
Materials scienceBlistersFluenceAnnealing (glass)Amorphous solidIon implantationMicrostructureHeliumHydrogenIonRecrystallization (geology)CrystallographyChemical physicsComposite materialAtomic physicsPhysicsChemistryQuantum mechanicsPaleontologyBiologyOrganic chemistrySilicon Carbide Semiconductor TechnologiesSemiconductor materials and devicesThin-Film Transistor Technologies