Effects of post-deposition annealing temperature in nitrogen/oxygen/nitrogen ambient on polycrystalline gallium oxide films
Puteri Haslinda Megat Abdul Hedei, Z. Hassan, Hock Jin Quah
Topics & Concepts
Materials scienceNitrogenCrystalliteAnnealing (glass)OxygenSputter depositionAnalytical Chemistry (journal)OxideGalliumBand gapSputteringThin filmOptoelectronicsNanotechnologyChemistryComposite materialMetallurgyChromatographyOrganic chemistryGa2O3 and related materialsZnO doping and propertiesGaN-based semiconductor devices and materials