A NO <sub>2</sub> Gas Sensor with a TiO <sub>2</sub> Nanoparticles/ZnO/MEMS-Structure that is Produced Using Ultrasonic Wave Grinding Technology
Ting-Jia Chang, Ting‐Jen Hsueh
Abstract
This study produces TiO 2 nanoparticles (NPs) using ultrasonic wave grinding technology. The experimental results show that the average diameter of TiO 2 NPs is about 75 nm. The micro-Raman spectrum shows that the crystal quality of these TiO 2 NPs is good. The TiO 2 NPs are integrated with a ZnO/MEMS structure to form a MEMS NO 2 gas sensor. Sensor response increases initially, reaches a maximum at 150 °C and then begins to decrease as the operational temperature is increased from 130 °C to 190 °C. The sensor response is increased when the concentration of NO 2 gas is increased.
Topics & Concepts
Microelectromechanical systemsGrindingMaterials scienceUltrasonic sensorNanoparticleRaman spectroscopyChemical engineeringNanotechnologyOptoelectronicsAnalytical Chemistry (journal)Composite materialAcousticsOpticsChemistryChromatographyPhysicsEngineeringGas Sensing Nanomaterials and SensorsAnalytical Chemistry and SensorsAdvanced Chemical Sensor Technologies