Sputter hot filament hollow cathode ion source and its application to ultra-low energy ion implantation in 2D materials
Felix Junge, Manuel Auge, H. Hofsäß
2021Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms15 citationsDOI
Topics & Concepts
Materials scienceIon implantationSputteringCathodeIon sourceIonIon beam depositionMolybdenumGrapheneNiobiumIon beamIon beam mixingOptoelectronicsAnalytical Chemistry (journal)NanotechnologyThin filmChemistryMetallurgyOrganic chemistryChromatographyPhysical chemistryGraphene research and applicationsIon-surface interactions and analysisDiamond and Carbon-based Materials Research