A multimodal hierarchical learning approach for virtual metrology in semiconductor manufacturing
Qunlong Chen, Wei Qin, Hongwei Xu
Topics & Concepts
Semiconductor device fabricationMetrologyManufacturing engineeringComputer scienceEngineeringIndustrial engineeringSystems engineeringArtificial intelligenceMathematicsElectrical engineeringStatisticsWaferIndustrial Vision Systems and Defect DetectionManufacturing Process and OptimizationAdvanced Surface Polishing Techniques