Growth of bulk β-Ga2O3 single crystals by the Czochralski method

Abstract

The present Tutorial provides a description of the growth of bulk β-Ga2O3 single crystals by the Czochralski method with a focus on the critical growth aspects. In particular, it details the thermodynamics of Ga2O3 as the key factor for crystal growth along with comprehensive solutions that are essential for crystal size scale-up. Also, free carrier absorption is discussed, as it has a great impact on growth stability. The crystal growth direction and intentional doping, as important factors for crystal growth, are described as well. All of the aspects of the crystal growth are accompanied by resulting crystals, their structural quality, and basic physical properties.

Topics & Concepts