Unintentional doping effect in Si-doped MOCVD β-Ga2O3 films: Shallow donor states
Xueqiang Xiang, Li-Heng Li, Chen Chen, Guangwei Xu, Fangzhou Liang, Pengju Tan, Xuanze Zhou, Weibing Hao, Xiaolong Zhao, Haiding Sun, Kan‐Hao Xue, Nan Gao, Shibing Long
Topics & Concepts
Metalorganic vapour phase epitaxyDopingEpitaxyChemical vapor depositionSiliconShallow donorPartial pressureSecondary ion mass spectrometryMaterials scienceChemistryDensity functional theoryAnalytical Chemistry (journal)Carbon fibersOxygenOptoelectronicsNanotechnologyIonComputational chemistryOrganic chemistryLayer (electronics)Composite materialComposite numberGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques