Litcius/Paper detail

Selective Removal of Gold: N-Heterocyclic Carbenes as Positive Etch Resists on Planar Gold Surfaces

Florian Boße, Christian Gutheil, Dzung T. Nguyen, Matthias Freitag, Mowpriya Das, Bonnie J. Tyler, Thorsten Adolphs, Andreas Schäfer, Heinrich F. Arlinghaus, Frank Glorius, Bart Jan Ravoo

2023ACS Applied Materials & Interfaces12 citationsDOI

Abstract

N-Heterocyclic carbene (NHC)-modified planar gold surfaces (NHC@Au) were found to be more susceptible toward wet chemical etching than undecorated surface areas. Site-selective decoration of NHCs on Au was achieved by microcontact printing (μCP) of the NHC precursors 1,3-bis(diisopropylphenyl)imidazol-3-ium hydrogen carbonate (IPr(H)[HCO 3 ]) or 1,3-dimethylbenzimidazol-3-ium hydrogen carbonate (BIMe(H)[HCO 3 ]). Strikingly, BIMe@Au showed concentration-dependent etching behavior, tunable from a positive resist to a negative resist. Surface patterning was verified by time-of-flight secondary-ion mass spectrometry and Kelvin probe force microscopy. Moreover, orthogonal μCP enabled the patterned functionalization of planar Au with both IPr and 1-eicosanethiol and the subsequent formation of three-dimensional structures with a single etching step. The selective removal of Au by functionalization with a surface ligand is unprecedented and enables novel applications of NHCs in materials chemistry and nanofabrication.

Topics & Concepts

ResistSurface modificationMaterials scienceCarbeneMicrocontact printingNanotechnologyEtching (microfabrication)NanolithographyChemical engineeringChemistryOrganic chemistryCatalysisFabricationLayer (electronics)EngineeringPathologyMedicineAlternative medicineNanofabrication and Lithography TechniquesMolecular Junctions and NanostructuresSemiconductor materials and devices