Polarized laser scattering detection of low-density and micron-scale subsurface cracks in silicon wafer
Fangyuan Shi, Qixin Lv, Ping Zhou, Qian Bai
Topics & Concepts
WaferMaterials scienceGrindingSiliconLaserScatteringFinite-difference time-domain methodOpticsIndentationComposite materialOptoelectronicsPhysicsAdvanced Surface Polishing TechniquesSurface Roughness and Optical MeasurementsLaser Material Processing Techniques