Subsurface damage and brittle fracture suppression of monocrystalline germanium in ultra-precision machining by multiple ion implantation surface modification
Yi Tan, Wai Sze Yip, Te Zhao, Suet To, Zejia Zhao, Zejia Zhao
Topics & Concepts
Monocrystalline siliconBrittlenessMaterials scienceMachiningGermaniumBrittle fractureIon implantationFracture (geology)IonMetallurgyComposite materialSiliconChemistryOrganic chemistryAdvanced Surface Polishing TechniquesIntegrated Circuits and Semiconductor Failure AnalysisDiamond and Carbon-based Materials Research