Low-temperature spatial atomic layer deposited Ga2O3 films for high-performance flexible deep ultraviolet photodetector
Chia‐Hsun Hsu, Run-Feng Zhu, Pin-Chun Kang, Peng Gao, Wan-Yu Wu, Dong‐Sing Wuu, Shui‐Yang Lien, Wen‐Zhang Zhu
Topics & Concepts
Materials scienceUltravioletAtomic layer depositionPhotodetectorAmorphous solidSubstrate (aquarium)OptoelectronicsLayer (electronics)Deposition (geology)Dark currentImpurityChemical vapor depositionAnalytical Chemistry (journal)NanotechnologyChemistryCrystallographyChromatographyGeologyOceanographyOrganic chemistryBiologySedimentPaleontologyGa2O3 and related materialsZnO doping and propertiesNanoplatforms for cancer theranostics