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Synthesis of TiN/N-doped TiO2 composite films as visible light active photocatalyst

Glenson R. Panghulan, Magdaleno R. Vasquez, Yasmin D.G. Edañol, Narong Chanlek, Leon M. Payawan

2020Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena33 citationsDOI

Abstract

Titanium nitride/nitrogen-doped titanium oxide (TiN/N-doped TiO2) composite films were synthesized for visible light photodegradation applications. Thin films of TiN were sputter-deposited on precleaned glass substrates in an admixture of argon and nitrogen gases. The grown TiN films were subsequently oxidized in air at 350 °C at 15, 30, and 60 min. Raman spectral analysis revealed the formation of TiO2 with anatase structure at 15 min and transitioned to the rutile structure at longer oxidation times. X-ray photoelectron spectral analysis revealed the formation of N-doped TiO2 from the oxidized Ti. Visible light-induced photodegradation of methylene blue as test analyte showed 30% removal efficiency after exposure to visible light after 2.5 h. The highest degradation efficiency was observed when the anatase phase of TiO2 is the dominant phase in the film. Moreover, N-doping realized the visible light sensitivity of TiO2. This makes the composite film ideal for solar light-driven photodegradation of organic contaminants in wastewater.

Topics & Concepts

PhotodegradationAnataseMaterials scienceVisible spectrumTin oxideTinRutilePhotocatalysisX-ray photoelectron spectroscopyThin filmDopingRaman spectroscopyTitanium nitridePhotochemistryChemical engineeringNitrideNanotechnologyChemistryOptoelectronicsOpticsMetallurgyOrganic chemistryCatalysisLayer (electronics)EngineeringPhysicsTiO2 Photocatalysis and Solar CellsAdvanced Photocatalysis TechniquesAdvanced Nanomaterials in Catalysis
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