Scratching properties of 4H–SiC single crystal after oxidation under different conditions
Xinxing Ban, Zhuangzhi Tian, Shaodong Zheng, Jianhui Zhu, Wenlan Ba, Ningchang Wang, Shaoxing Han, Hui Qiu, Xing Wang, Zhengxin Li
Topics & Concepts
Materials sciencePolishingScratchScanning electron microscopeX-ray photoelectron spectroscopyMachinabilitySilicon carbideComposite materialDiamondRaman spectroscopyTransmission electron microscopyFracture toughnessMetallurgyChemical engineeringNanotechnologyMachiningOpticsPhysicsEngineeringAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchIntegrated Circuits and Semiconductor Failure Analysis