Modal characteristics of coupled MEMS resonator array under the effect of residual stress
Bo Peng, Kai‐Ming Hu, Xiao-Yong Fang, Xiu‐Yuan Li, Wenming Zhang
Topics & Concepts
Residual stressResonatorMaterials scienceCoupling (piping)Microelectromechanical systemsVibrationStress (linguistics)AcousticsResidualFinite element methodOpticsStructural engineeringPhysicsOptoelectronicsComposite materialEngineeringMathematicsLinguisticsPhilosophyAlgorithmAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsAcoustic Wave Resonator Technologies