Feasibility Study of Wafer Scale Laser Assisted Thermal Imprinting of Glass Nanostructures
Helen Lee, Syarifah Nur Hasanah Binti Kamarudin, Ismayuzri Ishak, Ahmad Rosli Abdul Manaf, Ahmad Shahir Jamaludin, Mohd Ali Hanafiah Shaharudin, Mohd Zairulnizam Zawawi
Topics & Concepts
Materials scienceWaferLaserMoldIrradiationImprinting (psychology)SiliconComposite materialThermalLaser scanningNanostructureSubstrate (aquarium)Thermal transferNanotechnologyOptoelectronicsOpticsLayer (electronics)ChemistryBiochemistryGeneMeteorologyNuclear physicsGeologyPhysicsOceanographyNanofabrication and Lithography TechniquesAdvanced Surface Polishing TechniquesSurface Roughness and Optical Measurements