The impact of the combination of xanthan gum and polyvinyl pyrrolidone (PVP) on the chemical mechanical polishing of through silicon via (TSV) barrier layer
Tao Zheng, Ru Wang, Yanwei Dong, Xuhua Chen, Zhanjie Du
Topics & Concepts
Materials scienceXanthan gumChemical-mechanical planarizationSurface roughnessChemical engineeringX-ray photoelectron spectroscopyPolyvinylpyrrolidoneLayer (electronics)PolishingComposite materialNuclear chemistryPolymer chemistryChemistryEngineeringRheologyAdvanced Surface Polishing TechniquesIntegrated Circuits and Semiconductor Failure AnalysisAdvanced Machining and Optimization Techniques