Towards understanding uniformity of megasonic-assisted through-mask electrochemical micromachining based on bubble dynamics
Mingxin Yu, Liqun Du, Ke Zhai, Haohao Cheng, Fenglai Wang, Aoqi Li, Zhongmin Wang
Topics & Concepts
Materials scienceMultiphysicsAnodeBubbleEtching (microfabrication)Surface micromachiningOhmic contactIsotropic etchingCavitationNanotechnologyOptoelectronicsElectrodeAcousticsMechanicsLayer (electronics)FabricationFinite element methodPhysical chemistryMedicineAlternative medicinePathologyChemistryThermodynamicsPhysicsAdvanced Machining and Optimization TechniquesCorrosion Behavior and InhibitionHydrogen embrittlement and corrosion behaviors in metals