Photocatalytic reactive distillation - A novel process intensification approach for purification of electronic-grade silicon tetrachloride
Xiong Zhao, Zhengkun Hou, Shuhu Guo, Renze Shi, Ye Wan, Jianhua Liu, Zhenjun Yuan, Hong Li, Dazhou Yan, Xin Gao
Topics & Concepts
Silicon tetrachlorideReactive distillationProcess (computing)DistillationMaterials scienceImpurityWaferSiliconChemical engineeringProcess engineeringChemistryOrganic chemistryNanotechnologyComputer scienceOptoelectronicsEngineeringOperating systemTiO2 Photocatalysis and Solar CellsExtraction and Separation ProcessesAdvanced Nanomaterials in Catalysis