Review: RF magnetron sputtering, a promising synthesis route for scalable production of thin-film batteries
R. Karthikeyan, Christie Thomas Cherian, R. Fernandes
Topics & Concepts
Materials scienceSputter depositionThin filmSputteringOptoelectronicsCavity magnetronHigh-power impulse magnetron sputteringNanotechnologyEngineering physicsEngineeringAdvancements in Battery MaterialsZnO doping and propertiesAdvanced Battery Materials and Technologies