Monolithic 3D sequential integration realizing 1600-PPI red micro-LED display on Si CMOS driver IC
Juhyuk Park, Dae‐Myeong Geum, Woojin Baek, Johnson Shieh, Sanghyeon Kim
20222022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)10 citationsDOI
Abstract
This work demonstrated the monolithic 3D (M3D) integrated red micro-LED display on Si CMOS driver IC. We achieved a very high pixel density of 1600 PPI by epitaxial layer engineering and low-temperature process design for the micro- display application. M3D sequential integration on pre- fabricated Si CMOS driver IC allows lithographic alignment for the pixel definition, providing high-resolution and the largest emission area per pixel pitch. Furthermore, the low-temperature process provided the lowest standby power among ever reported micro-LED displays. We believe that this work would be one of the milestones for future ultra-high-resolution displays.
Topics & Concepts
CMOSPixelLithographyMaterials scienceProcess (computing)Integrated circuitHigh resolutionDot pitchOptoelectronicsComputer scienceElectrical engineeringElectronic engineeringComputer hardwareEngineeringArtificial intelligenceRemote sensingGeologyOperating systemThin-Film Transistor TechnologiesPhotonic and Optical DevicesAdvanced Optical Imaging Technologies