Fluorine-implanted indium-gallium-zinc oxide (IGZO) chemiresistor sensor for high-response NO2 detection
Sunil Babu Eadi, Hyun-Jin Shin, P. Senthil Kumar, Ki-Woo Song, R. Yuvakkumar, Hi‐Deok Lee
Topics & Concepts
ChemiresistorMaterials scienceDopingAnalytical Chemistry (journal)Nitrogen dioxideSelectivityFluorineSputter depositionThin filmIndiumSputteringIonZincGalliumInorganic chemistryOptoelectronicsNanotechnologyChemistryMetallurgyChromatographyOrganic chemistryBiochemistryCatalysisGas Sensing Nanomaterials and SensorsZnO doping and propertiesAnalytical Chemistry and Sensors