The importance of discharge voltage in DC magnetron sputtering for energy of sputtered and backscattered atoms on the substrate: Monte-Carlo simulations
Alireza Farhadizadeh, Tomáš Kozák
Topics & Concepts
SputteringArgonSputter depositionSubstrate (aquarium)Materials scienceAtomic physicsMonte Carlo methodDeposition (geology)Atom (system on chip)Cavity magnetronBiasingHigh-power impulse magnetron sputteringVoltageRange (aeronautics)Thin filmNanotechnologyPhysicsEmbedded systemComposite materialComputer scienceMathematicsQuantum mechanicsGeologyPaleontologyStatisticsBiologySedimentOceanographyMetal and Thin Film MechanicsSemiconductor materials and devicesPlasma Diagnostics and Applications