Characterization of sp2/sp3 hybridization ratios of hydrogenated amorphous carbon films deposited in C2H2 inductively coupled plasmas
Jie Li, Sun Jung Kim, Seung-Hun Han, Heeyeop Chae
Topics & Concepts
Materials scienceCharacterization (materials science)Inductively coupled plasmaAmorphous solidPlasmaAmorphous carbonCarbon fibersAnalytical Chemistry (journal)Carbon filmThin filmChemical engineeringNanotechnologyCrystallographyComposite materialEnvironmental chemistryComposite numberChemistryEngineeringQuantum mechanicsPhysicsDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsSemiconductor materials and devices