Preparation of tungsten-doped zinc oxide thin films by co-sputtering for micro-gas sensing devices
Yu‐Jen Hsiao, Yempati Nagarjuna, Guo-Yu Huang, Mei‐Chun Lin
Topics & Concepts
SputteringDopingZincTungstenMaterials scienceThin filmTungsten oxideOptoelectronicsOxideSputter depositionNanotechnologyMetallurgyChemical engineeringInorganic chemistryChemistryEngineeringGas Sensing Nanomaterials and SensorsZnO doping and propertiesTransition Metal Oxide Nanomaterials