Atomic removal mechanism of nano polishing for single-crystal AlN substrate via molecular dynamics
Yan He, Jingting Sun, Peng Gao, Shuyuan Song, Kaiyuan Wang, Meiling Tang
Topics & Concepts
Materials scienceAbrasiveSubstrate (aquarium)Molecular dynamicsCrystal (programming language)PolishingStackingStacking faultAmorphous solidCrystallographyComposite materialDislocationChemistryComputational chemistryGeologyOceanographyProgramming languageOrganic chemistryComputer scienceAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdvanced machining processes and optimization