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Atomic removal mechanism of nano polishing for single-crystal AlN substrate via molecular dynamics

Yan He, Jingting Sun, Peng Gao, Shuyuan Song, Kaiyuan Wang, Meiling Tang

2023Materials Science in Semiconductor Processing22 citationsDOI

Topics & Concepts

Materials scienceAbrasiveSubstrate (aquarium)Molecular dynamicsCrystal (programming language)PolishingStackingStacking faultAmorphous solidCrystallographyComposite materialDislocationChemistryComputational chemistryGeologyOceanographyProgramming languageOrganic chemistryComputer scienceAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdvanced machining processes and optimization
Atomic removal mechanism of nano polishing for single-crystal AlN substrate via molecular dynamics | Litcius