Structure and electrochromic properties of WO3 thin films by direct current, pulsed direct current, and radio frequency magnetron sputtering from metallic and ceramic targets
Yong Jun Park, Kwang‐Mo Kang, Ji Ho Kang, Deokyeon Lee, Sung Hun Na, Seung Ho Han, Yoon‐Chae Nah, Dong Hun Kim
Topics & Concepts
ElectrochromismMaterials scienceSputteringThin filmOptoelectronicsPulsed DCCeramicTransmittanceSputter depositionDirect currentHigh-power impulse magnetron sputteringElectrochromic devicesNanotechnologyComposite materialElectrodeElectrical engineeringChemistryPhysical chemistryVoltageEngineeringTransition Metal Oxide NanomaterialsGas Sensing Nanomaterials and SensorsAdvanced Memory and Neural Computing