High doping efficiency in p-type Al-rich AlGaN by modifying the Mg doping planes
Xinjia Qiu, Yingda Chen, Enze Han, Zesheng Lv, Zhiyuan Song, Hao Jiang
Abstract
High doping efficiency of the Mg dopant in Al-rich AlGaN is highly desired for AlGaN based deep ultraviolet optoelectronics.
Topics & Concepts
DopingDopantMaterials scienceOptoelectronicsUltravioletGaN-based semiconductor devices and materialsGa2O3 and related materialsZnO doping and properties