Femtosecond laser two-beam interference applied to 4H-SiC surface hierarchical micro-nano structure fabrication
Yi-Hsien Liu, Kong-Kai Kuo, Chung‐Wei Cheng, An‐Chen Lee
Topics & Concepts
FemtosecondMaterials scienceOpticsLaserBeam (structure)Superposition principleInterference (communication)Gaussian beamFabricationIrradiationBeam diameterNano-Laser beam qualityOptoelectronicsLaser beamsPhysicsComposite materialComputer scienceAlternative medicineComputer networkPathologyChannel (broadcasting)Quantum mechanicsNuclear physicsMedicineLaser Material Processing TechniquesAdvanced Surface Polishing TechniquesLaser-induced spectroscopy and plasma