Achieving smooth PZT surface via chemical mechanical polishing with ethylenediamine dihydrochloride
Yuan Wu, Liang Jiang, Linmao Qian
Topics & Concepts
Materials scienceChemical-mechanical planarizationEthylenediaminePolishingFerroelectricityLead zirconate titanateDissolutionSurface roughnessChemical engineeringAdsorptionComposite materialNanotechnologyOptoelectronicsInorganic chemistryDielectricPhysical chemistryChemistryEngineeringAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationFerroelectric and Piezoelectric Materials