Virtual metrology in semiconductor manufacturing: Current status and future prospects
Varad Maitra, Yutai Su, Jing Shi
Topics & Concepts
Semiconductor device fabricationMetrologyComputer scienceProcess (computing)Manufacturing engineeringQuality (philosophy)Resource (disambiguation)Product (mathematics)Semiconductor industryState (computer science)Systems engineeringEngineering managementRisk analysis (engineering)EngineeringElectrical engineeringBusinessOperating systemGeometryStatisticsEpistemologyComputer networkWaferMathematicsAlgorithmPhilosophyIndustrial Vision Systems and Defect DetectionIntegrated Circuits and Semiconductor Failure AnalysisImage Processing Techniques and Applications