Wet etching in β-Ga<sub>2</sub>O<sub>3</sub> bulk single crystals
Zhu Jin, Yingying Liu, Ning Xia, Xiangwei Guo, Zijian Hong, Hui Zhang, Deren Yang
Abstract
Wet etching is a simple and effective method to identify defects, fabricate patterns, and polish wafers of semiconductors. We highlight recent progress in wet etching of β-Ga 2 O 3 substrates with an aim to comprehensively understand the etching behavior and mechanism.
Topics & Concepts
Etching (microfabrication)WaferMaterials scienceDry etchingSemiconductorIsotropic etchingNanotechnologyOptoelectronicsReactive-ion etchingLayer (electronics)Ga2O3 and related materialsZnO doping and propertiesElectronic and Structural Properties of Oxides